15 October 2012 Research on micro-displacement driving technology based on piezoelectric ceramic
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Abstract
Piezoelectric ceramic driving power is one critical technology of achieving the piezoelectric ceramic nano-precision positioning, which has been widely used in precision manufacturing, optical instruments, aerospace and other fields. In this paper, piezoelectric ceramic driving power will be summarized on micro-displacement driving technical development and research. The domestic and overseas piezoelectric-driven ways will be compared and control model algorithms will be discussed. Describe the advantages and disadvantages of piezoelectric ceramic driving power in a different driving and control model, and then show the scope of application of driving power.
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Bo Hu, Bo Hu, Xiaoping Tang, Xiaoping Tang, Song Hu, Song Hu, Wei Yan, Wei Yan, Zhicheng Hu, Zhicheng Hu, "Research on micro-displacement driving technology based on piezoelectric ceramic", Proc. SPIE 8418, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems, 84180Z (15 October 2012); doi: 10.1117/12.973648; https://doi.org/10.1117/12.973648
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