15 October 2012 Fabrication large area photonic crystals with periodic waveguide by one-step holographic lithography based on spatial light modulator
Author Affiliations +
Abstract
A one-step introduction of functional defects into a photonic crystal (PC) is demonstrated. By using a multi-beam phasecontrolled holographic lithography and a diffracting optical element, large area one dimensional (1D) and two dimensional (2D) PCs with periodic waveguide were fabricated. The uniform area is up to 4 mm2, and tens of waveguide have been introduced in the one dimension and two dimension PC structure. This technique gives rise to a substantial reduction of the fabrication complexity and a significant improvement on the accuracy of the functional defects in photonic crystals. This method can also been used to design and fabricate metamaterials.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yongchun Zhong, Yongchun Zhong, Jie Ma, Jie Ma, Kam Sing Wong, Kam Sing Wong, Zhe Chen, Zhe Chen, Jianying Zhou, Jianying Zhou, } "Fabrication large area photonic crystals with periodic waveguide by one-step holographic lithography based on spatial light modulator", Proc. SPIE 8418, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems, 84181F (15 October 2012); doi: 10.1117/12.2008759; https://doi.org/10.1117/12.2008759
PROCEEDINGS
5 PAGES


SHARE
Back to Top