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15 October 2012 Pyroelectric infrared linear arrays based on PIMNT
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Abstract
Pyroelectric infrared linear arrays can work at ambient temperature without cryogenic system and have the merits of comparatively homogenous spectral response in wide spectrum range, compact structure, long-time stability and low cost for many applications. xPb(In1/2Nb1/2)O3-yPb(Mg1/3Nb2/3)O3-(1-x-y)PbTiO3 (PIMNT) single crystal is a kind of novel pyroelectric material, which possesses superior pyroelectric performances and is appraised as a candidate for high performance pyroelectric infrared linear arrays. This paper describes the layout and essential properties of the pyroelectric infrared linear arrays based on PIMNT with 128 responsive elements. The transmittance measurement of PIMNT indicates that an absorption layer is needed when the PIMNT based linear arrays work at room temperature in 0.8—12.0 μm wave range due to the low absorption ratio especially in 0.8—10.0 μm wave band. The arrays employ a hybrid structure consisting of the PIMNT pyroelectric chip and CMOS read-out circuit. They are electrically bonded by ultrasonic bonding process. Also some details of the process technologies of the PIMNT pyroelectric chip are depicted in this paper.
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Xueliang Ma, Xiumei Shao, Yuehua Yu, Haosu Luo, Linhua Liu, Wang Xia, and Yanjin Li "Pyroelectric infrared linear arrays based on PIMNT", Proc. SPIE 8419, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices for Sensing, Imaging, and Solar Energy, 841914 (15 October 2012); https://doi.org/10.1117/12.975646
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