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15 October 2012 Study on platinum thermal sensitive films deposited using magnetic sputtering
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Abstract
The infrared imaging detecting technology has broad application prospects in military and civilian fields. The bolometer is one of mainstream uncooled infrared detectors, because it has many advantages, for example, light weight, wide dynamic range, excellent response linearity, and without refrigeration and chopper which leads to low manufacturing cost. In many infrared detecting sensitive materials, Pt films have wider linear range, lower noise, and compatibility with silicon integrated process excellently. In this paper, Pt sensitive films were deposited by means of magnetron sputtering, the preparation process of Pt films for the infrared imaging detecting unit was studied, the temperature coefficient of resistance (TCR) of Pt films can be improved by vacuum annealing to achieve 1.737 ‰/K. The micro-structure and micro-fabrication process of infrared imaging detecting unit based on Pt films were designed, and the heating character of infrared imaging detecting unit based on Pt films was measured using I-V character testing system. Testing results shown that, the properties of fabricated infrared thermal imaging detecting unit based on Pt films were better, Its TCR is about 1.64 ‰/K, and its thermal response is better.
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Changlong Cai, Weiguo Liu, Shun Zhou, and Yujia Zhai "Study on platinum thermal sensitive films deposited using magnetic sputtering", Proc. SPIE 8419, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices for Sensing, Imaging, and Solar Energy, 841916 (15 October 2012); doi: 10.1117/12.973727; https://doi.org/10.1117/12.973727
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