Numerical analysis of InSb parameters and InSb 2D infrared focal plane arrays

Xiaolei Zhang; Hongfei Zhang; Weiguo Sun; Lei Zhang; Chao Meng; Zhengxiong Lu

doi:10.1117/12.975268

15 October 2012 Numerical analysis of InSb parameters and InSb 2D infrared focal plane arrays

Xiaolei Zhang, Hongfei Zhang, Weiguo Sun, Lei Zhang, Chao Meng, Zhengxiong Lu

Proceedings Volume 8419, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices for Sensing, Imaging, and Solar Energy; 84192U (2012) https://doi.org/10.1117/12.975268
Event: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012), 2012, Xiamen, China

Abstract

Accurate and reliable numerical simulation tools are necessary for the development of advanced semiconductor devices. InSb is using the MATLAB and TCAD simulation tool to calculatet the InSb body bandstructure, blackbody's radiant emittance and simultaneously solve the Poisson, Continuity and transport equations for 2D detector structures. In this work the material complexities of InSb, such as non-parabolicity, degenergcy, mobility and Auger recombination/generation are explained, and physics based models are developed. The Empirical Tight Binding Method (ETBM) was been using to calculate the bandstructure for InSb at 77 K by Matlab. We describe a set of systematic experiments performed in order to calibrate the simulation to semiconductor devices backside illuminated InSb focal plane arrays realized with planar technology. The spectral photoresponse and crosstalk characteristic for mid-wavelength InSb infrared focal plane arrays have been numerically studied.

Citation Download Citation

Xiaolei Zhang, Hongfei Zhang, Weiguo Sun, Lei Zhang, Chao Meng, and Zhengxiong Lu "Numerical analysis of InSb parameters and InSb 2D infrared focal plane arrays", Proc. SPIE 8419, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices for Sensing, Imaging, and Solar Energy, 84192U (15 October 2012); https://doi.org/10.1117/12.975268

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