15 October 2012 The optical properties of different temperature deposited ZnS film in visible to near-infrared region
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Abstract
In this paper, Zinc Sulfide (ZnS) single-layer films were deposited on Germanium (Ge) substrate by thermal evaporation with film thickness about 1600 nm, and deposition temperature were 115°C, 155°C and 230°C. Reflective index of Ge substrate and ZnS film were measured by infrared spectroscopy and Spectroscopic Ellipsometry (SE). Additionally, Scanning Electron Microscopy (SEM) was used to observe the thin film structure graphics. The experiment results indicate that the prepared conditions have a great influence on optical constants of film, appropriately increase the deposition temperature will be helpful for increasing the packing density, and the refractive index is closely related to the surface micro-structure of film.
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Ming Zhou, Dingquan Liu, Tianyan Yu, Qingyuan Cai, "The optical properties of different temperature deposited ZnS film in visible to near-infrared region", Proc. SPIE 8419, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices for Sensing, Imaging, and Solar Energy, 84192W (15 October 2012); doi: 10.1117/12.2011005; https://doi.org/10.1117/12.2011005
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