Study of zero error in large-scale laser interferometric measurement system

Jian-shuang Li; Xiao-you Ye; Mingzhao He; Xiao-chuan Gan; Tao Wang

doi:10.1117/12.974852

15 October 2012 Study of zero error in large-scale laser interferometric measurement system

Jian-shuang Li, Xiao-you Ye, Mingzhao He, Xiao-chuan Gan, Tao Wang

Proceedings Volume 8420, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical System Technologies for Manufacturing and Testing; 842006 (2012) https://doi.org/10.1117/12.974852
Event: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012), 2012, Xiamen, China

Abstract

Large-scale measurement systems of range over 30m are main traceable devices of dimensional measurement for modern large-scale advanced manufacture domain. High precision large-scale dimensional measurement devices with flexibility and openness are made up of length measurement system, environmental measuring system, guiding rail system and control system. In length measurement system using laser interferometers, zero error should be taken into account. This paper proposed a novel method to eliminate zero error in large-scale laser interferometric measurement system. The uncertainty of this system is improved experimentally.

Citation Download Citation

Jian-shuang Li, Xiao-you Ye, Mingzhao He, Xiao-chuan Gan, and Tao Wang "Study of zero error in large-scale laser interferometric measurement system", Proc. SPIE 8420, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical System Technologies for Manufacturing and Testing, 842006 (15 October 2012); https://doi.org/10.1117/12.974852

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KEYWORDS

Interferometers

Environmental sensing

Reflectors

Interferometry

Laser systems engineering

Measurement devices

Control systems

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