15 October 2012 Study of zero error in large-scale laser interferometric measurement system
Author Affiliations +
Proceedings Volume 8420, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical System Technologies for Manufacturing and Testing; 842006 (2012) https://doi.org/10.1117/12.974852
Event: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012), 2012, Xiamen, China
Abstract
Large-scale measurement systems of range over 30m are main traceable devices of dimensional measurement for modern large-scale advanced manufacture domain. High precision large-scale dimensional measurement devices with flexibility and openness are made up of length measurement system, environmental measuring system, guiding rail system and control system. In length measurement system using laser interferometers, zero error should be taken into account. This paper proposed a novel method to eliminate zero error in large-scale laser interferometric measurement system. The uncertainty of this system is improved experimentally.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jian-shuang Li, Jian-shuang Li, Xiao-you Ye, Xiao-you Ye, Mingzhao He, Mingzhao He, Xiao-chuan Gan, Xiao-chuan Gan, Tao Wang, Tao Wang, } "Study of zero error in large-scale laser interferometric measurement system", Proc. SPIE 8420, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical System Technologies for Manufacturing and Testing, 842006 (15 October 2012); doi: 10.1117/12.974852; https://doi.org/10.1117/12.974852
PROCEEDINGS
6 PAGES


SHARE
RELATED CONTENT

A novel measuring device for step gauge
Proceedings of SPIE (August 21 2014)
A method for the calibration of step gauges
Proceedings of SPIE (October 13 2006)

Back to Top