Laser-machined cascaded micro cavities for simultaneous measurement of dual parameters

Zengling Ran; Cheng Li; Min Ni; En Lu; Yunjiang Rao

doi:10.1117/12.975253

7 November 2012 Laser-machined cascaded micro cavities for simultaneous measurement of dual parameters

Zengling Ran, Cheng Li, Min Ni, En Lu, Yunjiang Rao

Proceedings Volume 8421, OFS2012 22nd International Conference on Optical Fiber Sensors; 842187 (2012) https://doi.org/10.1117/12.975253
Event: OFS2012 22nd International Conference on Optical Fiber Sensor, 2012, Beijing, China

Abstract

Fiber-optic cascaded micro Fabry-Perot (F-P) cavities fabricated by 157-nm laser micromachining is demonstrated, for simultaneous measurement of high temperature and refractive index, or high temperature and strain, respectively. The sensor head consists of a short air extrinsic F-P cavity and an intrinsic single-mode fiber F-P cavity. These two micro cavities possess different response coefficients to temperature, stain and refractive index, which are ultilized for dual parameters measurement. Experimental results shows dual parameters meausurement could been achived from 50℃ ~380℃ based on such a sensing structure.

Citation Download Citation

Zengling Ran, Cheng Li, Min Ni, En Lu, and Yunjiang Rao "Laser-machined cascaded micro cavities for simultaneous measurement of dual parameters", Proc. SPIE 8421, OFS2012 22nd International Conference on Optical Fiber Sensors, 842187 (7 November 2012); https://doi.org/10.1117/12.975253

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