8 May 2012 Micromachining of optical fibers using selective etching of doped silica glass
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This paper presents a highly effective micromachining process that can reform a section of an optical fiber into an allfiber, complex photonic microstructure. The proposed process utilizes specially designed structure forming fibers that are reformed into various complex shapes through selective etching. The control over the etching rate of the structureforming fiber sections is achieved by the introduction of dopants, particularly phosphorus pentoxide, into silica glass through the standard fiber manufacturing technology. Doping with appropriate dopants and dopant concentrations can be used to create highly-preferential etchable areas within a fiber cross-section that can be selectively removed upon exposing the fiber to the etching medium. The doped areas in the fiber cross-section can thus serve as sacrificial layers, similar to those in the case of silicon MEMS production. Thus, the shaping of fiber devices can be achieved through the design and fabrication of structure-forming fibers.
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Simon Pevec, Simon Pevec, Edvard Cibula, Edvard Cibula, Borut Lenardič, Borut Lenardič, Denis Đonlagić, Denis Đonlagić, } "Micromachining of optical fibers using selective etching of doped silica glass", Proc. SPIE 8428, Micro-Optics 2012, 84280S (8 May 2012); doi: 10.1117/12.922045; https://doi.org/10.1117/12.922045

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