8 May 2012 Development of glass microoptics for MidIR with hot embossing technology
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In this paper we report on the development of diffractive and refractive micro optical components devoted to MidIR applications. As a material we use a customized heavy metal oxide glasses with high transmission in the range 0.6÷6.0μm. Optimization of the glass composition in four- and five-component oxide systems for a broadband transmission window is difficult due to their excessive crystallization susceptibility. Several metals and alloys were tested for their suitability as a stamping medium. Optimal performance was obtained for selected brass and steel stamps, as well as for pure silica stamps. As a technology testboard we have developed 1D and 2D diffractive gratings with a minimum feature size of 5μm as well as Fresnel microlenses with a diameter of 200μm. The quality of the embossed elements was verified by comparison of the master and replicated elements using a non-contact white light interferometer.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
I. Kujawa, I. Kujawa, R. Stepien, R. Stepien, A. J. Waddie, A. J. Waddie, G. Skrabalak, G. Skrabalak, M. R. Taghizadeh, M. R. Taghizadeh, R. Buczynski, R. Buczynski, } "Development of glass microoptics for MidIR with hot embossing technology", Proc. SPIE 8428, Micro-Optics 2012, 84281P (8 May 2012); doi: 10.1117/12.922711; https://doi.org/10.1117/12.922711


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