8 May 2012 Development of glass microoptics for MidIR with hot embossing technology
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Abstract
In this paper we report on the development of diffractive and refractive micro optical components devoted to MidIR applications. As a material we use a customized heavy metal oxide glasses with high transmission in the range 0.6÷6.0μm. Optimization of the glass composition in four- and five-component oxide systems for a broadband transmission window is difficult due to their excessive crystallization susceptibility. Several metals and alloys were tested for their suitability as a stamping medium. Optimal performance was obtained for selected brass and steel stamps, as well as for pure silica stamps. As a technology testboard we have developed 1D and 2D diffractive gratings with a minimum feature size of 5μm as well as Fresnel microlenses with a diameter of 200μm. The quality of the embossed elements was verified by comparison of the master and replicated elements using a non-contact white light interferometer.
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I. Kujawa, I. Kujawa, R. Stepien, R. Stepien, A. J. Waddie, A. J. Waddie, G. Skrabalak, G. Skrabalak, M. R. Taghizadeh, M. R. Taghizadeh, R. Buczynski, R. Buczynski, } "Development of glass microoptics for MidIR with hot embossing technology", Proc. SPIE 8428, Micro-Optics 2012, 84281P (8 May 2012); doi: 10.1117/12.922711; https://doi.org/10.1117/12.922711
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