4 May 2012 Advanced optical characterization of micro solid immersion lens
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Abstract
We report on the advanced optical characterizations of microfabricated solid immersion lenses with 2-μm diameter, operating at λ= 642 nm. The main feature, the spot size reduction, has been investigated by applying a focused Gaussian beam of NA = 0.9. Particular illuminating beams, e.g., Bessel-Gauss beams of the zeroth and the first order, a doughnutshape beam and its decompositions, i.e. two-half-lobes beams, have also been used to influence the shape of the immersed focal spot. Detailed optical characterizations have been conducted by measuring the amplitude and phase distributions with a high-resolution interference microscope (HRIM) in volume around the focal spot. The immersion effect of the SiO2 solid immersion lens leads to a spot-size reduction of approximately 1.5 which agrees well with theory. Particularly shaped incident beams exhibit a comparable size reduction of the immersed spots. Such structured focal spots are of significant interest in optical trapping, lithography, and optical data storage systems.
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Myun-Sik Kim, Myun-Sik Kim, Toralf Scharf, Toralf Scharf, Mickael Brun, Mickael Brun, Segolene Olivier, Segolene Olivier, Sergio Nicoletti, Sergio Nicoletti, Hans Peter Herzig, Hans Peter Herzig, } "Advanced optical characterization of micro solid immersion lens", Proc. SPIE 8430, Optical Micro- and Nanometrology IV, 84300E (4 May 2012); doi: 10.1117/12.921871; https://doi.org/10.1117/12.921871
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