27 April 2012 Extrinsic calibration of a fringe projection sensor based on a zoom stereo microscope in an automatic multiscale measurement system
Author Affiliations +
Abstract
Multi scale systems offer the opportunity to balance the conflict between execution time, measurement volume and resolution for the inspection of highly complex surface profiles. An example of such a task is the inspection of gears. At first, the coarse position and form of the specimen is registered by a sensor measuring with comparatively low resolution but a large field of view. Possible defects near to the resolution limit are indicated and new regions of interest for higher resolved measurements are identified. As prerequisite for a successful multi-scale inspection, every sampled data set, acquired in different scales and at varying positions, must be registered in one global data model. This is only possible if the extrinsic coordinate transform from the sensor's internal coordinate system to the common, global coordinate system of the inspected object and its uncertainties are known. In this paper, we present an approach for the extrinsic calibration using the example of a multi-zoom fringe projection sensor mounted on a multi-axes measurement system. Finally we show the measurement result of a gear, where several sampled patches are merged together into one point cloud with the aid of the presented calibration.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Marc Gronle, Marc Gronle, Wolfram Lyda, Wolfram Lyda, Avinash Burla, Avinash Burla, Wolfgang Osten, Wolfgang Osten, } "Extrinsic calibration of a fringe projection sensor based on a zoom stereo microscope in an automatic multiscale measurement system", Proc. SPIE 8430, Optical Micro- and Nanometrology IV, 84300J (27 April 2012); doi: 10.1117/12.922583; https://doi.org/10.1117/12.922583
PROCEEDINGS
12 PAGES


SHARE
Back to Top