Application of linear systems theory to characterize coherence scanning interferometry

Rahul Mandal; Kanik Palodhi; Jeremy Coupland; Richard Leach; Daniel Mansfield

doi:10.1117/12.922435

7 May 2012 Application of linear systems theory to characterize coherence scanning interferometry

Rahul Mandal, Kanik Palodhi, Jeremy Coupland, Richard Leach, Daniel Mansfield

Proceedings Volume 8430, Optical Micro- and Nanometrology IV; 84300T (2012) https://doi.org/10.1117/12.922435
Event: SPIE Photonics Europe, 2012, Brussels, Belgium

Abstract

This paper considers coherence scanning interferometry as a linear filtering operation that is characterised by a point spread function in the space domain or equivalently a transfer function in the frequency domain. The applicability of the theory is discussed and the effects of these functions on the measured interferograms, and their influence on the resulting surface measurements, are described. The practical characterisation of coherence scanning interferometers using a spherical reference artefact is then considered and a new method to compensate measurement errors, based on a modified inverse filter, is demonstrated.

Citation Download Citation

Rahul Mandal, Kanik Palodhi, Jeremy Coupland, Richard Leach, and Daniel Mansfield "Application of linear systems theory to characterize coherence scanning interferometry", Proc. SPIE 8430, Optical Micro- and Nanometrology IV, 84300T (7 May 2012); https://doi.org/10.1117/12.922435

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