4 May 2012 IR-SWLI for subsurface imaging of large MEMS structures
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Abstract
LED based infrared scanning white light interferometry (IR-SWLI) permits non-destructive imaging of embedded MEMS structures. We built an IR-SWLI instrument featuring a custom-built IR-range LED-based light source, capable of stroboscopic use. The source combines multiple separately controllable LEDs with different wavelengths into a collimated homogenous beam offering an adjustable spectrum. We employ software-based image stitching to form millimeter-size 3D images from multiple high magnification scans. These images delineate three layers in a MEMS cavity covered by silicon and reveal a micron-size inlet inside the channel.
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A. Nolvi, V. Heikkinen, I. Kassamakov, J. Aaltonen, T. Ylitalo, O. Saresoja, M. Berdova, S. Franssila, E. Hæggström, "IR-SWLI for subsurface imaging of large MEMS structures", Proc. SPIE 8430, Optical Micro- and Nanometrology IV, 843018 (4 May 2012); doi: 10.1117/12.922105; https://doi.org/10.1117/12.922105
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