10 May 2012 Co-integration of Ge detectors and Si modulators in an advanced Si photonics platform
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Abstract
A Si photonics platform is described, co-integrating advanced passive components with Si modulators and Ge detectors. This platform is developed on a 200mm CMOS toolset, compatible with a 130nm CMOS baseline. The paper describes the process flow, and describes the performance of selected electro-optical devices to demonstrate the viability of the flow.
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Peter Verheyen, Guy Lepage, Joris Van Campenhout, Marianna Pantouvaki, Philippe Absil, Peter De Heyn, Wim Bogaerts, Pieter Dumon, Shankar Selvaraja, "Co-integration of Ge detectors and Si modulators in an advanced Si photonics platform", Proc. SPIE 8431, Silicon Photonics and Photonic Integrated Circuits III, 843114 (10 May 2012); doi: 10.1117/12.921747; https://doi.org/10.1117/12.921747
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