10 May 2012 Co-integration of Ge detectors and Si modulators in an advanced Si photonics platform
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Abstract
A Si photonics platform is described, co-integrating advanced passive components with Si modulators and Ge detectors. This platform is developed on a 200mm CMOS toolset, compatible with a 130nm CMOS baseline. The paper describes the process flow, and describes the performance of selected electro-optical devices to demonstrate the viability of the flow.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Peter Verheyen, Peter Verheyen, Guy Lepage, Guy Lepage, Joris Van Campenhout, Joris Van Campenhout, Marianna Pantouvaki, Marianna Pantouvaki, Philippe Absil, Philippe Absil, Peter De Heyn, Peter De Heyn, Wim Bogaerts, Wim Bogaerts, Pieter Dumon, Pieter Dumon, Shankar Selvaraja, Shankar Selvaraja, } "Co-integration of Ge detectors and Si modulators in an advanced Si photonics platform", Proc. SPIE 8431, Silicon Photonics and Photonic Integrated Circuits III, 843114 (10 May 2012); doi: 10.1117/12.921747; https://doi.org/10.1117/12.921747
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