Lithium niobate-on-insulator (LNOI): status and perspectives

Hui Hu; Jin Yang; Li Gui; Wolfgang Sohler

doi:10.1117/12.922401

10 May 2012 Lithium niobate-on-insulator (LNOI): status and perspectives

Hui Hu, Jin Yang, Li Gui, Wolfgang Sohler

Proceedings Volume 8431, Silicon Photonics and Photonic Integrated Circuits III; 84311D (2012) https://doi.org/10.1117/12.922401
Event: SPIE Photonics Europe, 2012, Brussels, Belgium

Abstract

As optical components continue to replace electronics in ultrafast signal processing applications, a growing interest in further miniaturization and integration of photonic devices on a single chip is observed. Therefore, optical waveguides of high refractive index contrast of core and cladding materials are developed since a couple of years. They can have a very small cross section and also bending radius, enabling the development of ultra-compact photonic integrated devices and circuits. Silicon-On-Insulator (SOI) waveguides ("photonic wires") and devices are the most prominent examples. A corresponding technology for Lithium Niobate-On-Insulator (LNOI) waveguides is still in its infancy, though LN offers - in contrast to SOI - excellent electro-optic, acousto-optic, and nonlinear optical properties. Moreover, it can be easily doped with rare-earth ions to get a laser active material. Therefore, LNOI photonic wires will enable the development of a wide range of extremely compact, active integrated devices, including electro-optical modulators, tunable filters, nonlinear (periodically poled) wavelength converters, and amplifiers and lasers of different types. The state-of-the-art of LNOI films as platform for high-density integrated optics is reviewed. Using a full-wafer technology (3" diameter), sub-micrometer thin LN films are obtained by high-dose He⁺ ion implantations, crystal-bonding to a low-index substrate (preferably SiO₂) and cleaving by a special annealing step ("ion-beam-slicing"). Various LNOI structures, also combined with metallic layers, are presented. Based on such platforms, photonic wires and micro-photonic devices are developed using different micro- and nano-structuring techniques. To be specific, the fabrication and characterization of LNOI photonic wires with cross-section < 1 μm², and periodically poled LNOI photonic wires for second harmonic generation are reported in detail.

Citation Download Citation

Hui Hu, Jin Yang, Li Gui, and Wolfgang Sohler "Lithium niobate-on-insulator (LNOI): status and perspectives", Proc. SPIE 8431, Silicon Photonics and Photonic Integrated Circuits III, 84311D (10 May 2012); https://doi.org/10.1117/12.922401

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