Low-nonlinearity and low-loss silicon slot waveguides with ALD-grown thin films

L. Karvonen; A. Säynätjoki; X. Tu; T. Y. Liow; M. Hiltunen; J. Hiltunen; A. Tervonen; G. Q. Lo; S. Honkanen

doi:10.1117/12.921805

15 May 2012 Low-nonlinearity and low-loss silicon slot waveguides with ALD-grown thin films

L. Karvonen, A. Säynätjoki, X. Tu, T. Y. Liow, M. Hiltunen, J. Hiltunen, A. Tervonen, G. Q. Lo, S. Honkanen

Proceedings Volume 8431, Silicon Photonics and Photonic Integrated Circuits III; 84311M (2012) https://doi.org/10.1117/12.921805
Event: SPIE Photonics Europe, 2012, Brussels, Belgium

Abstract

We demonstrate low-loss silicon slot waveguides filled with single and dual atomic layer deposited oxide layers. Propagation losses less than 5 dB/cm and 8 dB/cm are achieved for the waveguides with single (Al₂O₃) and double (Al₂O₃-TiO₂) layers, respectively. The devices are fabricated using low-temperature CMOS compatible processes. The geometries allow nonlinearities nearly two orders of magnitude smaller than plain silicon waveguides.

Citation Download Citation

L. Karvonen, A. Säynätjoki, X. Tu, T. Y. Liow, M. Hiltunen, J. Hiltunen, A. Tervonen, G. Q. Lo, and S. Honkanen "Low-nonlinearity and low-loss silicon slot waveguides with ALD-grown thin films", Proc. SPIE 8431, Silicon Photonics and Photonic Integrated Circuits III, 84311M (15 May 2012); https://doi.org/10.1117/12.921805

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