Silicon-based monolithically integrated whispering-gallery mode resonators with buried waveguides

M. Ghulinyan; F. Ramiro Manzano; R. Guider; N. Prtljaga; G. Pucker; L. Pavesi

doi:10.1117/12.922226

11 May 2012 Silicon-based monolithically integrated whispering-gallery mode resonators with buried waveguides

M. Ghulinyan; F. Ramiro Manzano; R. Guider; N. Prtljaga; G. Pucker; L. Pavesi

Author Affiliations +

Proceedings Volume 8431, Silicon Photonics and Photonic Integrated Circuits III; 84311O (2012) https://doi.org/10.1117/12.922226
Event: SPIE Photonics Europe, 2012, Brussels, Belgium

Abstract

We report on the realization and characterization of a silicon-based integrated optical platform which implements a vertical coupling scheme between a Whispering-gallery type microresonator and a buried dielectric waveguide. The vertical coupling allows for the separation of the resonator and the waveguide into different planes, which enables one to realize the optical components in different materials/thicknesses. The high optical quality of this cavity micro-optical system follows from the accurate planarization of the waveguide topography, which is achieved by multiple depositions-and- reflows of a borophosphosilicate glass over strip waveguides. Importantly, we demonstrate the feasibility of our approach for wafer-scale mass fabrication of freestanding planar resonators suspended in air and coupled to integrated bus waveguides. This opens the door for the realization of stable all-integrated resonator systems for optomechanical and metrological applications and has the potential to substitute today's complicated fiber-taper coupling schemes.

Citation Download Citation

M. Ghulinyan, M. Ghulinyan, F. Ramiro Manzano, F. Ramiro Manzano, R. Guider, R. Guider, N. Prtljaga, N. Prtljaga, G. Pucker, G. Pucker, L. Pavesi, L. Pavesi, } "Silicon-based monolithically integrated whispering-gallery mode resonators with buried waveguides", Proc. SPIE 8431, Silicon Photonics and Photonic Integrated Circuits III, 84311O (11 May 2012); doi: 10.1117/12.922226; https://doi.org/10.1117/12.922226

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