10 May 2012 Slot ring biosensors using silicon nitride waveguides with small temperature coefficient
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Abstract
We propose the biosensor chip using optical ring resonators. Although the detection of biomarkers for the diagnosis of diseases generally requires high sensitivity of the order of 10-9 g/ml, the detection sensitivity of our device was of the order of 10-7 g/ml. In this paper, we show that 10 or 100 times higher sensitivity than the previous biosensor is accomplished by the following three strategies; (1) using slot-type waveguides, (2) using silicon nitride (SiN) as the waveguide core, (3) improvement of measurement system.
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Anna Hirowatari, Tomoya Taniguchi, Takeshi Ikeda, Masataka Fukuyama, Yoshiteru Amemiya, Akio Kuroda, Shin Yokoyama, "Slot ring biosensors using silicon nitride waveguides with small temperature coefficient", Proc. SPIE 8431, Silicon Photonics and Photonic Integrated Circuits III, 84311S (10 May 2012); doi: 10.1117/12.922536; https://doi.org/10.1117/12.922536
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