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15 May 2012 Hybrid integration approach of VCSELs for miniaturized optical deflection of microparticles
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In recent years, optical manipulation has gained increasing interest, especially in combination with microfluidics. This combination offers promising tools for a fast and cost-effective sample analysis and manipulation. The contamination-free handling of micrometer-sized particles without any mechanical contact is an attractive tool for biology and medicine. VCSELs (vertical-cavity surface-emitting lasers) are an excellent choice for the trapping lasers, offering the opportunity of parallel particle manipulation by using two-dimensional VCSEL arrays, and of miniaturization by means of integration. In this paper, we present two novel concepts for the realization of the so-called integrated optical trap, resembling a strongly miniaturized version of the typically bulky setup of an optical trap. For this purpose, AlGaAs-GaAs-based VCSEL arrays with a very small device pitch were fabricated. We show the realization of integration-ready particle manipulation devices, both with top-emitting and with bottom-emitting densely packed VCSEL arrays. The smallest pitch of 18 μm is achieved with bottom-emitting VCSEL arrays, having mesa diameters of only 16 μm.
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Anna Bergmann, Niazul Islam Khan, Jose Antonio Martos Calahorro, Dietmar Wahl, and Rainer Michalzik "Hybrid integration approach of VCSELs for miniaturized optical deflection of microparticles", Proc. SPIE 8432, Semiconductor Lasers and Laser Dynamics V, 843204 (15 May 2012);

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