Preparation of periodically arranged metallic nanostructures using nanoimprint lithography

S. Jüchter; H. Hauser; Ch. Wellens; A. Guttowski; M. Peters; J. C. Goldschmidt; U. T. Schwarz; B. Bläsi

doi:10.1117/12.922214

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2 May 2012 Preparation of periodically arranged metallic nanostructures using nanoimprint lithography

S. Jüchter, H. Hauser, Ch. Wellens, A. Guttowski, M. Peters, J. C. Goldschmidt, U. T. Schwarz, B. Bläsi

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Proceedings Volume 8438, Photonics for Solar Energy Systems IV; 84380S (2012) https://doi.org/10.1117/12.922214
Event: SPIE Photonics Europe, 2012, Brussels, Belgium

Abstract

We present a process chain to generate periodically arranged metallic nanostructures supporting plasmons for the use in solar cells. As proof-of-concept, platinum and silver nanoparticles with a period of 1 μm and a diameter of 600 nm were fabricated. For the platinum particles, an absorption enhancement for light with a wavelength of 3.6 μm was observed in silicon. By decreasing structure sizes the active spectral region can be shifted to wavelength relevant for solar cell applications. Therefore, in a second step a silver grating with a smaller period and also smaller diameter of approximately 200 nm was realized.

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S. Jüchter, H. Hauser, Ch. Wellens, A. Guttowski, M. Peters, J. C. Goldschmidt, U. T. Schwarz, and B. Bläsi "Preparation of periodically arranged metallic nanostructures using nanoimprint lithography", Proc. SPIE 8438, Photonics for Solar Energy Systems IV, 84380S (2 May 2012); https://doi.org/10.1117/12.922214

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