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2 May 2012 Laser thermoreflectance for semiconductor thin films metrology
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Abstract
We present a thermoreflectance-based metrology concept applied to compound semiconductor thin films off-line characterization in the solar cells scribing process. The presented thermoreflectance setup has been used to evaluate the thermal diffusivity of thin CdTe films and to measure eventual changes in the thermal properties of 5 μm CdTe films ablated by nano and picosecond laser pulses. The temperature response of the CdTe thin film to the nanosecond heating pulse has been numerically investigated using the finite-difference time-domain (FDTD) method. The computational and experimental results have been compared.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
P. Gailly, J. Hastanin, C. Duterte, Y. Hernandez, J.-B. Lecourt, A. Kupisiewicz, P.-E. Martin, and K. Fleury-Frenette "Laser thermoreflectance for semiconductor thin films metrology", Proc. SPIE 8438, Photonics for Solar Energy Systems IV, 84381F (2 May 2012); https://doi.org/10.1117/12.922576
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