9 May 2012 Design, fabrication and measurements with a UV linear-variable optical filter microspectrometer
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Abstract
An IC-Compatible Linear-Variable Optical Filter (LVOF) for application in the UV spectral range between 310 nm and 400 nm has been fabricated using resist reflow and an optimized dry-etching. The LVOF is mounted on the top of a commercially available CMOS camera to result in a UV microspectrometer. A special calibration technique has been employed that is based on an initial spectral measurement on a Xenon lamp. The image recorded on the camera during calibration is used in a signal processing algorithm to reconstruct the spectrum of the Mercury lamp and the calibration data is subsequently used in UV spectral measurements. Experiments on fabricated LVOF-based microspectrometer with this calibration approach implemented reveal a spectral resolution of 0.5 nm.
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Arvin Emadi, Arvin Emadi, Huaiwen Wu, Huaiwen Wu, Ger de Graaf, Ger de Graaf, Peter Enoksson, Peter Enoksson, José Higino Correia, José Higino Correia, Reinoud Wolffenbuttel, Reinoud Wolffenbuttel, } "Design, fabrication and measurements with a UV linear-variable optical filter microspectrometer", Proc. SPIE 8439, Optical Sensing and Detection II, 84390V (9 May 2012); doi: 10.1117/12.922374; https://doi.org/10.1117/12.922374
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