9 May 2012 Design and implementation of IR microspectrometers based on linear-variable optical filters
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Abstract
This paper presents the design, fabrication and characterization of Infra-Red (IR) Linear Variable Optical Filter (LVOF)- based micro-spectrometers. Two LVOF microspectrometer designs have been realized: one for operating in the 1400 nm to 2500 nm wavelength range and another between 3000 nm and 5000 nm. The IR LVOFs have been fabricated in an ICCompatible process using resist reflow. The LVOF provides the possibility to have a small size, robust and highresolution micro-spectrometer in the IR on a detector chip. Such IR microspectrometers can be fabricated at low-cost in high volume production and have huge potential in applications such as liquid identification (e.g. water in alcohol, water in oil) and gas sensing.
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Arvin Emadi, Arvin Emadi, Huaiwen Wu, Huaiwen Wu, Ger de Graaf, Ger de Graaf, Reinoud Wolffenbuttel, Reinoud Wolffenbuttel, } "Design and implementation of IR microspectrometers based on linear-variable optical filters", Proc. SPIE 8439, Optical Sensing and Detection II, 84391O (9 May 2012); doi: 10.1117/12.922320; https://doi.org/10.1117/12.922320
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