Silicon-on-insulator (SOI) nanobeam optical cavities for refractive index based sensing

M. Ghazali A. Rahman; Philippe Velha; Richard M. De La Rue; Nigel P. Johnson

doi:10.1117/12.922554

9 May 2012 Silicon-on-insulator (SOI) nanobeam optical cavities for refractive index based sensing

M. Ghazali A. Rahman, Philippe Velha, Richard M. De La Rue, Nigel P. Johnson

Proceedings Volume 8439, Optical Sensing and Detection II; 84391Q (2012) https://doi.org/10.1117/12.922554
Event: SPIE Photonics Europe, 2012, Brussels, Belgium

Abstract

We present the design modelling and fabrication of Silicon-On-Insulator (SOI) nanobeam cavities that are immersed in a microfluidic system for refractive index sensing. The device has sensitivity value of greater than 200 nm/RIU with a Q-factor more than 20 000 in water. It was fabricated on a SOI platform and working at telecom wavelengths. The use of the SOI platform also offers further possibilities of integration with CMOS technologies.

Citation Download Citation

M. Ghazali A. Rahman, Philippe Velha, Richard M. De La Rue, and Nigel P. Johnson "Silicon-on-insulator (SOI) nanobeam optical cavities for refractive index based sensing", Proc. SPIE 8439, Optical Sensing and Detection II, 84391Q (9 May 2012); https://doi.org/10.1117/12.922554

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