Repair Technology for Large Scale Photomasks

Fumio Aramaki

doi:10.1117/12.1000135

2 July 2013 Repair Technology for Large Scale Photomasks

Fumio Aramaki

Proceedings Volume 8441, Photomask and Next-Generation Lithography Mask Technology XIX; 84410O (2013) https://doi.org/10.1117/12.1000135
Event: Photomask and NGL Mask Technology XIX, 2012, Yokohama, Japan

Abstract

placeholder, paper by 6/22

Citation Download Citation

Fumio Aramaki "Repair Technology for Large Scale Photomasks", Proc. SPIE 8441, Photomask and Next-Generation Lithography Mask Technology XIX, 84410O (2 July 2013); https://doi.org/10.1117/12.1000135

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available