Novel MRC algorithms using GPGPU

Kokoro Kato; Yoshiyuki Taniguchi; Tadao Inoue; Kazuya Kadota

doi:10.1117/12.970255

29 June 2012 Novel MRC algorithms using GPGPU

Kokoro Kato, Yoshiyuki Taniguchi, Tadao Inoue, Kazuya Kadota

Proceedings Volume 8441, Photomask and Next-Generation Lithography Mask Technology XIX; 84410R (2012) https://doi.org/10.1117/12.970255
Event: Photomask and NGL Mask Technology XIX, 2012, Yokohama, Japan

Abstract

GPGPU (General Purpose Graphic Processor Unit) has been attracting many engineers and scientists who develop their own software for massive numerical computation. With hundreds of core-processors and tens of thousands of threads operating concurrently, GPGPU programs can run significantly fast if their software architecture is well optimized. The basic program model used in GPGPU is SIMD (Single Instruction Multiple Data stream), and one must adapt his programming model to SIMD. However, conditional branching is fundamentally not allowed in SIMD and this limitation is quite challenging to apply GPGPU to photomask related software such as MDP or MRC. In this paper unique methods are proposed to utilize GPU for MRC operation. We explain novel algorithms of mask layout verification by GPGPU.

Citation Download Citation

Kokoro Kato, Yoshiyuki Taniguchi, Tadao Inoue, and Kazuya Kadota "Novel MRC algorithms using GPGPU", Proc. SPIE 8441, Photomask and Next-Generation Lithography Mask Technology XIX, 84410R (29 June 2012); https://doi.org/10.1117/12.970255

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