29 June 2012 Master mold and working replica fabrication for nano-imprinting lithography for 1Tbit/inch2 and 25nm pitch bit patterned media
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Proceedings Volume 8441, Photomask and Next-Generation Lithography Mask Technology XIX; 84411N (2012) https://doi.org/10.1117/12.978286
Event: Photomask and NGL Mask Technology XIX, 2012, Yokohama, Japan
Abstract
Bit Patterned Media (BPM) is essential of HDD media areal density increase, which will be combined with heatassisted magnetic recording (HAMR) eventually for thermal diffusion prevention. 1Tbit/inch2 areal density is the first demonstration target, which is 25nm pitch hole array, for the BPM development. Nano-Imprinting Lithography (NIL) is indispensable too, so molds as well, for the BPM large-scale production for throughput. At the beginning, 52nm pitch and below was successfully made on quartz master-mold. However, by our comprehensive development and improvement in material and process, we successfully fabricate 25nm pitch master-mold by EB Lithography, 25nm pitch working-replica by Nano-Imprinting Lithography as well.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hideo Kobayashi, Hideo Kobayashi, Shuji Kishimoto, Shuji Kishimoto, Kouta Suzuki, Kouta Suzuki, Hiromasa Iyama, Hiromasa Iyama, Sakae Nakatsuka, Sakae Nakatsuka, Kazutake Taniguchi, Kazutake Taniguchi, Takaeshi Kagatsume, Takaeshi Kagatsume, Takashi Sato, Takashi Sato, Tsuyoshi Watanabe, Tsuyoshi Watanabe, } "Master mold and working replica fabrication for nano-imprinting lithography for 1Tbit/inch2 and 25nm pitch bit patterned media", Proc. SPIE 8441, Photomask and Next-Generation Lithography Mask Technology XIX, 84411N (29 June 2012); doi: 10.1117/12.978286; https://doi.org/10.1117/12.978286
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