13 September 2012 Low-cost unimorph deformable mirror with high actuator count for astronomical adaptive optics
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Abstract
A low-cost silicon unimorph deformable mirror (DM) with 214 actuators is presented. The finite element simulation indicates that the designed DM has an excellent correction performance for both low order and high order aberrations. The experimental actuator deflection is about 2μm at 100V. This DM has the potential to be used for astronomical adaptive optics.
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Jianqiang Ma, Jianqiang Ma, Ying Liu, Ying Liu, Chen Xu, Chen Xu, Hao Rong, Hao Rong, Baoqing Li, Baoqing Li, Jiaru Chu, Jiaru Chu, "Low-cost unimorph deformable mirror with high actuator count for astronomical adaptive optics", Proc. SPIE 8447, Adaptive Optics Systems III, 844707 (13 September 2012); doi: 10.1117/12.925522; https://doi.org/10.1117/12.925522
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