Low-cost Fresnel microlens array fabricated by a home-built maskless lithography system

G. A. Cirino; S. A. Lopera; A. N. Montagnoli; L. G. Neto; R. D. Mansano

doi:10.1117/12.928819

19 October 2012 Low-cost Fresnel microlens array fabricated by a home-built maskless lithography system

G. A. Cirino, S. A. Lopera, A. N. Montagnoli, L. G. Neto, R. D. Mansano

Author Affiliations +

Proceedings Volume 8489, Polymer Optics and Molded Glass Optics: Design, Fabrication, and Materials II; 848908 (2012) https://doi.org/10.1117/12.928819
Event: SPIE Optical Engineering + Applications, 2012, San Diego, California, United States

Abstract

This work presents the fabrication of a high fill factor Fresnel microlens array (MLA) by employing a low-cost homebuilt maskless exposure lithographic system. A phase relief structure was generated on a photoresist-coated silicon wafer, replicated in Polydimethylsiloxane (PDMS) and electrostatically bonded to a glass substrate. Optical characterization was based on the evaluation of the maximum intensity of each spot generated at the MLA focal plane as well as its full width at half maximum (FWHM) intensity values. The resulting FWHM and maximum intensity spot mean values were 50 ± 8% μm and 0.71 ± 7% a.u , respectively. Such a MLA can be applied as Shack-Hartmann wavefront sensors, in optical interconnects and to enhance the efficiency of detector arrays.

Citation Download Citation

G. A. Cirino, G. A. Cirino, S. A. Lopera, S. A. Lopera, A. N. Montagnoli, A. N. Montagnoli, L. G. Neto, L. G. Neto, R. D. Mansano, R. D. Mansano, "Low-cost Fresnel microlens array fabricated by a home-built maskless lithography system", Proc. SPIE 8489, Polymer Optics and Molded Glass Optics: Design, Fabrication, and Materials II, 848908 (19 October 2012); doi: 10.1117/12.928819; https://doi.org/10.1117/12.928819

ACCESS THE FULL ARTICLE

PERSONAL SIGN IN
Full access may be available with your subscription

Email or Username Forgot your username?

Password Forgot your password?

Show

Remember Email/Username on this computer

Remember Password

No SPIE account? Create an account
or Institutional Sign In via Shibboleth

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $14.40

Non-members: $18.00 ADD TO CART

Show All Keywords

Keywords/Phrases

Search In:

Publication Years