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15 October 2012 Micromachined reference samples for particle counting
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Abstract
Three micromachined reference sample prototypes for particle counting have been fabricated by using dark ceramic spots in a transparent glass wafer to simulate particles on a surface. The direct write approach permits the spots to be positioned at random locations within an indicated area of the sample with sizes and numbers that are consistent with a distribution of particles. The goal of this work is to provide a path to creating a set of particle counting and sizing samples that can be used to establish the accuracy and precision of different measurements.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
David P. Taylor, William W. Hansen, Lee Steffeney, and C.-T. Chu "Micromachined reference samples for particle counting", Proc. SPIE 8492, Optical System Contamination: Effects, Measurements, and Control 2012, 84920J (15 October 2012); https://doi.org/10.1117/12.940174
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