13 September 2012 Calibrating the sag due to gravity of horizontal interferometer reference flats
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Abstract
We describe a method for measuring the deflection due to gravity (sag) of horizontally mounted reference flats of phase shifting interferometers. The planarity of a test flat can be measured sag-free while supporting it iso-statically on a suitable visco-elastic polymer foam. A sag map is obtained when the sag-free flatness error is subtracted from the flatness error of the same flat held at its edge.
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Jan Burke, Jan Burke, Ulf Griesmann, Ulf Griesmann, } "Calibrating the sag due to gravity of horizontal interferometer reference flats", Proc. SPIE 8493, Interferometry XVI: Techniques and Analysis, 84930F (13 September 2012); doi: 10.1117/12.929968; https://doi.org/10.1117/12.929968
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