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13 September 2012 Sinusoidal wavelength-scanning interferometer for profile measurement of metal surfaces
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Abstract
Sinusoidal wavelength-scanning (SWS) interferometry is unique in that a time-varying interference signal contains phase-modulation amplitude Zb due to the SWS besides a conventional phase α. Propagation time and wavefront of the light wave diffusely reflected from a metal surface can be detected from the amplitude Zb and the phase α, respectively. A concave shape with the depth of about a few hundreds microns is measured with an error less than a few microns by using only the amplitude Zb of the detected interference signal.
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Osami Sasaki, Takahiro Kurashige, Samuel Choi, and Takamasa Suzuki "Sinusoidal wavelength-scanning interferometer for profile measurement of metal surfaces", Proc. SPIE 8493, Interferometry XVI: Techniques and Analysis, 84930M (13 September 2012); https://doi.org/10.1117/12.929137
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