Improve Fourier transform profilometry by locally area modulating squared binary structured pattern

William Lohry; Song Zhang

doi:10.1117/12.927439

13 September 2012 Improve Fourier transform profilometry by locally area modulating squared binary structured pattern

William Lohry, Song Zhang

Proceedings Volume 8493, Interferometry XVI: Techniques and Analysis; 849312 (2012) https://doi.org/10.1117/12.927439
Event: SPIE Optical Engineering + Applications, 2012, San Diego, California, United States

Abstract

Our recent study found that it is very difficult to use the binary defocusing technique to completely suppress the 3rd-order harmonics, and thus it is challenging to achieve high-quality three-dimensional (3-D) measurement with the Fourier transformation method. This paper presents a novel approach to effectively eliminate the 3rd order harmonics by modulating the binary structured patterns in both x and y directions. Both simulation and experimental results will be presented to verify the performance of the proposed technique.

Citation Download Citation

William Lohry and Song Zhang "Improve Fourier transform profilometry by locally area modulating squared binary structured pattern", Proc. SPIE 8493, Interferometry XVI: Techniques and Analysis, 849312 (13 September 2012); https://doi.org/10.1117/12.927439

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