15 October 2012 Surface characterization using combined analysis of original and scatter image
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In a corresponding paper the optical design of combined microscopic and scatterometrical imaging devices is extensively discussed. The current paper deals with concepts of the necessary combined data analysis. A major problem is the fact that usually only the power distributions of both original and scatter images can be measured with arguable effort, and so both domains have to offer certain non-redundant information. Basic concepts, theoretical investigations of limitations and examples from typical applications are presented.
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Wenjing Zhao, Wenjing Zhao, Cornelius Hahlweg, Cornelius Hahlweg, Hendrik Rothe, Hendrik Rothe, } "Surface characterization using combined analysis of original and scatter image", Proc. SPIE 8495, Reflection, Scattering, and Diffraction from Surfaces III, 849508 (15 October 2012); doi: 10.1117/12.929472; https://doi.org/10.1117/12.929472

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