Development of surface profile measurement method for ellipsoidal x-ray mirrors using phase retrieval

Takahiro Saitou; Yoshinori Takei; Hidekazu Mimura

doi:10.1117/12.930340

19 October 2012 Development of surface profile measurement method for ellipsoidal x-ray mirrors using phase retrieval

Takahiro Saitou, Yoshinori Takei, Hidekazu Mimura

Proceedings Volume 8501, Advances in Metrology for X-Ray and EUV Optics IV; 850103 (2012) https://doi.org/10.1117/12.930340
Event: SPIE Optical Engineering + Applications, 2012, San Diego, California, United States

Abstract

An ellipsoidal mirror is a promising type of X-ray mirror, because it can focus X-rays to nanometer size with a very large aperture and no chromatic aberration. However, ideal ellipsoidal mirrors have not yet been realized by any manufacturing method. This is partly because there is no evaluation method for its surface figure profile. In this paper, we propose and develop a method for measuring surface figure profile of ellipsoidal mirrors using phase retrieval. An optical design for soft X-ray focusing, the employed phase retrieval method and an experimental optical system specialized for wavefront measurement using a He-Ne laser are reported.

Citation Download Citation

Takahiro Saitou, Yoshinori Takei, and Hidekazu Mimura "Development of surface profile measurement method for ellipsoidal x-ray mirrors using phase retrieval", Proc. SPIE 8501, Advances in Metrology for X-Ray and EUV Optics IV, 850103 (19 October 2012); https://doi.org/10.1117/12.930340

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available