19 October 2012 Development of surface profile measurement method for ellipsoidal x-ray mirrors using phase retrieval
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Abstract
An ellipsoidal mirror is a promising type of X-ray mirror, because it can focus X-rays to nanometer size with a very large aperture and no chromatic aberration. However, ideal ellipsoidal mirrors have not yet been realized by any manufacturing method. This is partly because there is no evaluation method for its surface figure profile. In this paper, we propose and develop a method for measuring surface figure profile of ellipsoidal mirrors using phase retrieval. An optical design for soft X-ray focusing, the employed phase retrieval method and an experimental optical system specialized for wavefront measurement using a He-Ne laser are reported.
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Takahiro Saitou, Takahiro Saitou, Yoshinori Takei, Yoshinori Takei, Hidekazu Mimura, Hidekazu Mimura, } "Development of surface profile measurement method for ellipsoidal x-ray mirrors using phase retrieval", Proc. SPIE 8501, Advances in Metrology for X-Ray and EUV Optics IV, 850103 (19 October 2012); doi: 10.1117/12.930340; https://doi.org/10.1117/12.930340
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