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15 October 2012 Measurement of groove density variation of varied-line-space grating for high-resolution soft x-ray monochromator
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Abstract
A varied-line-space grating is used in modern soft X-ray monochromators with a high resolving power. The grating parameters require high accuracy because errors of the parameters lead to the degradation of the resolving power. The parameter tolerances required to maintain a high resolving power were estimated by analytical calculation. The groove density variations of three gratings were measured with a long trace profiler. The measured errors in the parameters were found to be sufficiently small.
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Y. Senba, H. Kishimoto, T. Miura, H. Ohashi, S. Goto, and T. Ishikawa "Measurement of groove density variation of varied-line-space grating for high-resolution soft x-ray monochromator", Proc. SPIE 8501, Advances in Metrology for X-Ray and EUV Optics IV, 850104 (15 October 2012); https://doi.org/10.1117/12.936518
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