Methodology for optimal in situ alignment and setting of bendable optics for diffraction-limited focusing of soft x-rays

Daniel J. Merthe; Valeriy V. Yashchuk; Kenneth A. Goldberg; Martin Kunz; Nobumichi Tamura; Wayne R. McKinney; Nikolay A. Artemiev; Richard S. Celestre; Gregory Y. Morrison; Erik Anderson; Brian V. Smith; Edward E. Domning; Senajith B. Rekawa; Howard A. Padmore

doi:10.1117/12.930023

15 October 2012 Methodology for optimal in situ alignment and setting of bendable optics for diffraction-limited focusing of soft x-rays

Daniel J. Merthe, Valeriy V. Yashchuk, Kenneth A. Goldberg, Martin Kunz, Nobumichi Tamura, Wayne R. McKinney, Nikolay A. Artemiev, Richard S. Celestre, Gregory Y. Morrison, Erik Anderson, Brian V. Smith, Edward E. Domning, Senajith B. Rekawa, Howard A. Padmore

Author Affiliations +

Proceedings Volume 8501, Advances in Metrology for X-Ray and EUV Optics IV; 850108 (2012) https://doi.org/10.1117/12.930023
Event: SPIE Optical Engineering + Applications, 2012, San Diego, California, United States

Abstract

We demonstrate a comprehensive and broadly applicable methodology for the optimal in situ configuration of bendable soft x-ray Kirkpatrick-Baez mirrors. The mirrors used for this application are preset at the ALS Optical Metrology Laboratory prior to beamline installation. The in situ methodology consists of a new technique for simultaneously setting the height and pitch angle of each mirror. The benders of both mirrors were then optimally tuned in order to minimize ray aberrations to a level below the diffraction-limited beam waist size of 200 nm (horizontal) × 100 nm (vertical). After applying this methodology, we measured a beam waist size of 290 nm (horizontal) × 130 nm (vertical) with 1 nm light using the Foucault knife-edge test. We also discuss the utility of using a grating-based lateral shearing interferometer with quantitative wavefront feedback for further improvement of bendable optics.

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Daniel J. Merthe, Valeriy V. Yashchuk, Kenneth A. Goldberg, Martin Kunz, Nobumichi Tamura, Wayne R. McKinney, Nikolay A. Artemiev, Richard S. Celestre, Gregory Y. Morrison, Erik Anderson, Brian V. Smith, Edward E. Domning, Senajith B. Rekawa, and Howard A. Padmore "Methodology for optimal in situ alignment and setting of bendable optics for diffraction-limited focusing of soft x-rays", Proc. SPIE 8501, Advances in Metrology for X-Ray and EUV Optics IV, 850108 (15 October 2012); https://doi.org/10.1117/12.930023

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