15 October 2012 Temporal modulation of synchrotron x-rays using torsional MEMS mirrors
Author Affiliations +
We demonstrate the use of electrostatically driven micro-electromechanical systems (MEMS) devices to control and deliver synchrotron x-ray pulses at high repetition rates. Torsional MEMS micromirrors, rotating at duty cycles of 2 kHz and higher, were used to modulate grazing-incidence x rays, producing x-ray bunches shorter than 10 μs. We find that dynamic deformation of the oscillating micromirror is a limiting factor in the duration of the x-ray pulses produced, and we describe plans for reaching higher operating frequencies using mirrors designed for minimal deformation.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Donald A. Walko, Donald A. Walko, Il Woong Jung, Il Woong Jung, Daniel Lopez, Daniel Lopez, Deepkishore Mukhopadhyay, Deepkishore Mukhopadhyay, Craig P. Schwartz, Craig P. Schwartz, Gopal K. Shenoy, Gopal K. Shenoy, Jin Wang, Jin Wang, "Temporal modulation of synchrotron x-rays using torsional MEMS mirrors", Proc. SPIE 8502, Advances in X-Ray/EUV Optics and Components VII, 85020H (15 October 2012); doi: 10.1117/12.930057; https://doi.org/10.1117/12.930057


Back to Top