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19 October 2012 Silver halide integrated waveguides for sensing applications in the mid-infrared
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We report the demonstration of single mode AgClxBr1-x channel waveguides for mid-infrared range. The waveguides were made by the deposition of AgClxBr1-x layers on top of a Ag/Ti/SiO2/Si substrate, followed by photolithographic and lift-off processing. We showed that these waveguides operate in a single mode for the 6-14 μm band. The propagation losses of 20 dB/cm were measured at λ=10.6 μm using the cut-back method. We discuss the possible propagation losses mechanisms and show that the waveguide sidewall roughness is likely the major contributor for these losses. Using this fabrication process we have also realized Y-couplers and splitters. The development of these waveguides is a crucial step towards realizing on-chip AgClxBr1-x mid-infrared integrated optical circuits which will be used for applications such as chemical sensing and spectro-interferometry for planet detection.
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T. Lewi and A. Katzir "Silver halide integrated waveguides for sensing applications in the mid-infrared", Proc. SPIE 8512, Infrared Sensors, Devices, and Applications II, 85120F (19 October 2012);


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