15 October 2012 Studies on transmittance of silicon with AR coating films for IR transparent window
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We investigated silicon as a promising material for a IR transparent window platform of IR(Infrared Ray) sensors with WLP(wafer level package), because silicon has advantages in price and CMOS process compatibility compared to Ge window although Ge exhibits higher IR transmittance than Si. Having comparable transmittance to Ge is the key to use silicon as a IR transparent window platform. We compared several types of AR coating films, SiN, SiO2, only ZnS, and Ge/ZnS for finding the condition of maximizing transmittance of Si in the range of 8 ~12 um , LW-IR(Longwave IR). Also we investigated changing of transmittance for LW-IR after thermal treatments in several ambient gases and several temperatures.
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Myeongho Song, Myeongho Song, Eunmi Park, Eunmi Park, Moon Seop Hyun, Moon Seop Hyun, Tae Hyun Kim, Tae Hyun Kim, Hee Yeoun Kim, Hee Yeoun Kim, Gawon Lee, Gawon Lee, "Studies on transmittance of silicon with AR coating films for IR transparent window", Proc. SPIE 8512, Infrared Sensors, Devices, and Applications II, 85120P (15 October 2012); doi: 10.1117/12.928346; https://doi.org/10.1117/12.928346


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