19 October 2012 Microbolometer SU-8 photoresist microstructure with cytochrome c protein as a sensing pixel for microbolometer
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Abstract
There are two important parts in Microbolometer: the high TCR sensing material and low thermal conductance. The high TCR material cytochrome c protein is a good candidate for infrared detection. Our group already demonstrated cytochrome c thin film has high TCR on the top of SU8 surface that has been published in Proc. of SPIE (2011). Because the very low thermal conductivity of SU-8, we proposed a new concept of SU-8 photoresist thermal insulation desk structure, and used the exposure dose method to establish it. Although exposure dose method is very sensitive to exposure time and PEB time, we successfully investigated the right recipe to create new desk insulation structure which with different height. We also explored the relationship between mask II exposure time and desktop thickness, and how the post-exposure baking (PEB) time influenced our structure. Our SU-8 photoresist insulation structure fabrication process is much easier and cheaper than present SiNx fabrication process. The desk shape structure can have low thermal conductance of 6.681*10-6 W/K. The easy-made SU-8 microstructures and cytochrome c thin films that and can reduce the cost of IR microbolometer. We believe that it is possible to fabricate a new generation of microbolometer based on cytochrome c protein and SU-8 photoresist microstructures.
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Jian-Lun Lai, Guo-Dung J. Su, "Microbolometer SU-8 photoresist microstructure with cytochrome c protein as a sensing pixel for microbolometer", Proc. SPIE 8512, Infrared Sensors, Devices, and Applications II, 85120V (19 October 2012); doi: 10.1117/12.929194; https://doi.org/10.1117/12.929194
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