8 November 2012 Status of the AIMS(TM) EUV Project
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In previous conferences the status of the AIMS™ EUV project has been presented in which the basic layout scheme and preliminary design have been shown along with the targeted performance specification levels to be met. Presently the final design milestone of the project has been successfully completed and assembly of the prototype tool is underway. The final design concept will be presented along with the current status of the tool and simulated performance data.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Anthony D. Garetto, Anthony D. Garetto, Jan Hendrik Peters, Jan Hendrik Peters, Sascha Perlitz, Sascha Perlitz, Ulrich Matejka, Ulrich Matejka, Dirk Hellweg, Dirk Hellweg, Markus R. Weiss, Markus R. Weiss, } "Status of the AIMS(TM) EUV Project", Proc. SPIE 8522, Photomask Technology 2012, 852220 (8 November 2012); doi: 10.1117/12.981345; https://doi.org/10.1117/12.981345


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