4 December 2012 Automated laser damage threshold test systems of different test modes for optical elements
Author Affiliations +
The automated laser damage threshold test systems of different test modes are developed recently with micron-scale damage events automated detection, location and re-inspection. The system is carried out using a 10 ns pulsed Nd:YAG laser with a repetition rate of 10 Hz. In view of the requirements of weak site identification and growth test for initial damage sites, we pay more attention to the raster scan protocol. The automated test system is enabled by the pulsed stage movement method. A one pulse to one image correspondence have been set up during scans, which is available for the later confirmation of the automated damage detection results and the growth study at specified test sites. The new and grown defects are decided by comparing the pre-image and current image at the same place during different scans. Currently, the defect comparison rules and tolerance are being optimized to improve the accuracy of test systems.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Bin Ma, Bin Ma, Yanyun Zhang, Yanyun Zhang, Hongping Ma, Hongping Ma, Huasong Liu, Huasong Liu, Yiqin Ji, Yiqin Ji, } "Automated laser damage threshold test systems of different test modes for optical elements", Proc. SPIE 8530, Laser-Induced Damage in Optical Materials: 2012, 85301P (4 December 2012); doi: 10.1117/12.977448; https://doi.org/10.1117/12.977448


R on 1 automatic mapping a new tool for...
Proceedings of SPIE (May 26 1996)
Growth of laser damage on the input surface of SiO2...
Proceedings of SPIE (January 14 2007)
Acoustic method study of laser damage in optical thin films
Proceedings of SPIE (October 14 2012)
Growth of laser initiated damage in fused silica at 1053...
Proceedings of SPIE (February 20 2005)

Back to Top