4 December 2012 Characterization of scratches on fused silica optics and a way to remove them
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Abstract
Various scratches on fused silica optics after polishing have been characterized with confocal microscopy and then tested with nanosecond UV laser. Scratches are identified as a major contributor to laser damage even if they are only a few micrometers wide. We propose a process in order to remove these scratches whose depth ranges from 2 to 16 μm. We use a CO2 laser to heat the scratched areas at high temperature which will heal fractures due to viscous flow. The characterizations were completed by laser damage tests that finally prove the effectiveness of the repair. We conclude also that this repair process proves to be fast, localized to the scratch and clean because no debris are generated.
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P. Cormont, P. Cormont, T. Corbineau, T. Corbineau, Laurent Gallais, Laurent Gallais, C. Hecquet, C. Hecquet, Laurent Lamaignère, Laurent Lamaignère, J. L. Rullier, J. L. Rullier, } "Characterization of scratches on fused silica optics and a way to remove them", Proc. SPIE 8530, Laser-Induced Damage in Optical Materials: 2012, 853026 (4 December 2012); doi: 10.1117/12.976839; https://doi.org/10.1117/12.976839
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