26 October 2012 Micro-machined millimeter wave sensor array for FM radar application
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The objective of this work was to create a low cost sensor array that operates at room temperature for millimeter wave applications and could be used for FM radars and various heterodyne receivers. The selected technology was silicon wafer micromachining allowing the creation of microstructures on silicon membranes using different metal layers. The technology used allowed submicron dimensions for a photolithography pattern and thin membranes down to a few micrometers. One of the most critical requirements for the sensor was to achieve a high signal-to-noise ratio and a high bandwidth for a mixed frequency. The sensor is a titanium-based micro-bolometer connected to the micro-antenna which is integrated with the bolometer. The results are very promising. The measured NEP is below 5pW/√Hz and the sensitivity is close to 1000 V/W. In the paper the antenna - bolometer sensor microstructure is analyzed. Theoretical analysis and design guidelines for the bolometer itself are discussed. Simulation results of the bolometer and antenna show very close matching to the measured results. Characterization measurements were performed, and thermal behavior of microbolometer structure was simulated and measured. The measurement results are presented for THz FM radar different targets, and a technology demonstrator is also described.
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Janez Trontelj, Aleksander Sešek, "Micro-machined millimeter wave sensor array for FM radar application", Proc. SPIE 8544, Millimetre Wave and Terahertz Sensors and Technology V, 85440G (26 October 2012); doi: 10.1117/12.974706; https://doi.org/10.1117/12.974706


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