Design aspects of electrostatically driven MEMS adaptive mirror

Shailesh Kumar; Amita Gupta

doi:10.1117/12.925110

15 October 2012 Design aspects of electrostatically driven MEMS adaptive mirror

Shailesh Kumar, Amita Gupta

Proceedings Volume 8549, 16th International Workshop on Physics of Semiconductor Devices; 854917 (2012) https://doi.org/10.1117/12.925110
Event: 16th International Workshop on Physics of Semiconductor Devices, 2011, Kanpur, India

Abstract

Adaptive mirrors are used in modern adaptive optics systems for direct correction of aberration in a wave front. Silicon nitride membranes are widely used in the fabrication of MEMS deformable mirror In this paper, we have studied the design and simulation aspects of MEMS based electrostatically actuated continuous membrane adaptive mirror. We have studied the effect of several factors e.g. thickness and size of mirror membrane, size of bottom electrodes & voltage applied between top & bottom electrodes on response of the mirror.

Citation Download Citation

Shailesh Kumar and Amita Gupta "Design aspects of electrostatically driven MEMS adaptive mirror", Proc. SPIE 8549, 16th International Workshop on Physics of Semiconductor Devices, 854917 (15 October 2012); https://doi.org/10.1117/12.925110

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