15 October 2012 Design aspects of electrostatically driven MEMS adaptive mirror
Author Affiliations +
Proceedings Volume 8549, 16th International Workshop on Physics of Semiconductor Devices; 854917 (2012); doi: 10.1117/12.925110
Event: 16th International Workshop on Physics of Semiconductor Devices, 2011, Kanpur, India
Abstract
Adaptive mirrors are used in modern adaptive optics systems for direct correction of aberration in a wave front. Silicon nitride membranes are widely used in the fabrication of MEMS deformable mirror In this paper, we have studied the design and simulation aspects of MEMS based electrostatically actuated continuous membrane adaptive mirror. We have studied the effect of several factors e.g. thickness and size of mirror membrane, size of bottom electrodes & voltage applied between top & bottom electrodes on response of the mirror.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Shailesh Kumar, Amita Gupta, "Design aspects of electrostatically driven MEMS adaptive mirror", Proc. SPIE 8549, 16th International Workshop on Physics of Semiconductor Devices, 854917 (15 October 2012); doi: 10.1117/12.925110; http://dx.doi.org/10.1117/12.925110
PROCEEDINGS
7 PAGES


SHARE
KEYWORDS
Mirrors

Electrodes

Microelectromechanical systems

Silicon

Wavefronts

Deformable mirrors

Adaptive optics

Back to Top